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        Equipment

        shebeizhanshi

        Sapphire 909

        Overall dimension2.5 * 2.3 * 3.0m
        Effective coating space960 * 950mm
        Air extraction systemMolecular pump + mechanical pump
        Power Supply

        80KW,380V,50HZ,5PHASE

        BiasHigh frequency pulse power supply
        Number of target sources

        4,Magnetron sputtering 1 ~ 3, ion source 1 ~ 3

        Control systemProgrammable controller + computer
        Coating process temperature80 ~ 250 degrees
        Typical coatingSputtering tin titanium nitride, sputtering CrN chromium nitride, DLC diamond-like carbon, etc. single layer, composite, nano coating


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