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    Equipment

    shebeizhanshi

    Sapphire 909

    Overall dimension2.5 * 2.3 * 3.0m
    Effective coating space960 * 950mm
    Air extraction systemMolecular pump + mechanical pump
    Power Supply

    80KW,380V,50HZ,5PHASE

    BiasHigh frequency pulse power supply
    Number of target sources

    4,Magnetron sputtering 1 ~ 3, ion source 1 ~ 3

    Control systemProgrammable controller + computer
    Coating process temperature80 ~ 250 degrees
    Typical coatingSputtering tin titanium nitride, sputtering CrN chromium nitride, DLC diamond-like carbon, etc. single layer, composite, nano coating


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